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Beilstein J. Nanotechnol. 2014, 5, 234–244, doi:10.3762/bjnano.5.25
Figure 1: Illustration of one ALD cycle on a VACNT array. Upon exposure to the precursor gas (a: bulk gas dif...
Figure 2: Flow chart of the precursor exposure/adsorption simulation for one ALD cycle.
Figure 3: Results of the precursor adsorption kinetics simulation while using the parameters defined in Table 1. The...
Figure 4: Comparison of the simplified model (Equation 18) and the simulation of the full diffusion model (solid line) w...
Figure 5: Plot of deposited oxide thickness with respect to the VACNT depth for a multi-cycle ALD process, de...
Figure 6: Experimental results for TiO2 coated VACNTs. (a) An SEM image of a VACNT array coated with 400 cycl...